US 12,306,537 B2
Coating and development equipment
Xudong Hong, Liaoning (CN)
Assigned to KINGSEMI CO., LTD., Shenyang (CN)
Appl. No. 17/764,167
Filed by KINGSEMI CO., LTD., Liaoning (CN)
PCT Filed Oct. 5, 2019, PCT No. PCT/CN2019/109832
§ 371(c)(1), (2) Date Mar. 25, 2022,
PCT Pub. No. WO2021/062881, PCT Pub. Date Apr. 8, 2021.
Claims priority of application No. 201910944293.1 (CN), filed on Sep. 30, 2019.
Prior Publication US 2022/0334484 A1, Oct. 20, 2022
Int. Cl. G03F 7/16 (2006.01); B05C 13/00 (2006.01); B05C 13/02 (2006.01); H01L 21/02 (2006.01); H01L 21/027 (2006.01); H01L 21/67 (2006.01)
CPC G03F 7/16 (2013.01) [B05C 13/00 (2013.01); B05C 13/02 (2013.01); H01L 21/0274 (2013.01); H01L 21/6715 (2013.01)] 27 Claims
OG exemplary drawing
 
1. A coating and development equipment, comprising a cassette module, a first process module, a second process module, and an interface module, wherein one ends of the first process module and the second process module are connected to the cassette module, the other ends of the first process module and the second process module are connected to the interface module, a first inter-layer process manipulator, an intra-layer process manipulator group and a second inter-layer process manipulator are arranged between the first process module and the second process module, the intra-layer process manipulator group comprises, from bottom to top, a first intra-layer process manipulator, a second intra-layer process manipulator and a third intra-layer manipulator mounted on the same structure of the intra-layer process manipulator group, and the first inter-layer process manipulator, the second inter-layer process manipulator, and the first intra-layer process manipulator, the second intra-layer process manipulator, and the third intra-layer process manipulator each have two groups of end effectors facing oppositely, the number of each group of end effectors is m, and m is a natural number greater than or equal to 2.