US 12,306,399 B2
System and method for driving a two-axis scanning mirror using drivers of different types
Youmin Wang, Berkeley, CA (US); Yufeng Wang, Mountain View, CA (US); and Gary Li, Mountain View, CA (US)
Assigned to BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing (CN)
Filed by BEIJING VOYAGER TECHNOLOGY CO., LTD., Beijing (CN)
Filed on Feb. 9, 2021, as Appl. No. 17/172,047.
Prior Publication US 2022/0252867 A1, Aug. 11, 2022
Int. Cl. G02B 26/08 (2006.01); G01S 7/481 (2006.01); G02B 26/10 (2006.01); G01S 17/894 (2020.01); G01S 17/931 (2020.01)
CPC G02B 26/101 (2013.01) [G01S 7/4817 (2013.01); G02B 26/0841 (2013.01); G02B 26/0858 (2013.01); G01S 17/894 (2020.01); G01S 17/931 (2020.01)] 17 Claims
OG exemplary drawing
 
1. A scanner for steering optical beams, comprising:
a scanning mirror independently rotatable around a first axis and a second axis;
a first driver that is an electrostatic driver configured to drive the scanning mirror to rotate around the first axis at a first frequency that is twice a natural oscillation frequency of the scanning mirror;
a gimbal connected to the electrostatic driver, wherein the scanning mirror and the gimbal are simultaneously formed from a same silicon material; and
a second driver that is a piezoelectric driver configured to drive the scanning mirror to simultaneously rotate around the second axis.