| CPC G01N 21/6456 (2013.01) [G01N 21/21 (2013.01); G01N 21/6486 (2013.01); G02B 21/16 (2013.01); G02B 21/18 (2013.01); G02B 21/365 (2013.01); G01N 2201/127 (2013.01)] | 20 Claims |

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1. A system comprising:
an illumination source;
a specimen stage operable to support a specimen;
imaging optics;
a polarization state analyzer optically coupled to the imaging optics; and
one or more processors in communication with the illumination source and the polarization state analyzer, the one or more processors configured to perform operations comprising:
generating a plurality of illumination patterns;
rotating a calibration target at a plurality of orientations for each illumination pattern;
receiving an array of multiple sets of polarization channels from the polarization state analyzer;
converting multiple sets of polarization-resolved images at known orientations of a calibration target into a calibration tensor for each illumination pattern of the plurality of illumination patterns;
converting the array of multiple sets of polarization channels into Stokes parameter maps; and
deconvolving the Stokes parameter maps to provide a volumetric map of the permittivity tensor of the specimen to measure 3D density, 3D anisotropy, and 3D orientation of the specimen.
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