| CPC G01N 21/59 (2013.01) [G01N 2201/022 (2013.01); G01N 2201/0238 (2013.01)] | 9 Claims |

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1. A control apparatus comprising a controller configured to execute a condensation prevention process for preventing condensation on a window according to an ambient temperature and humidity of a chamber and a surface temperature of the window at an inside of the chamber, the chamber comprising the window and housing a light receiving element configured to receive light entering the chamber from the window via a sample for measurement located in a space outside the chamber or a light source configured to irradiate light on the sample through the window,
wherein as the condensation prevention process, the controller is configured to execute a process to control a condensation prevention apparatus installed inside the chamber and to start operation of the condensation prevention apparatus, and
wherein the controller is configured to set a condition value of the surface temperature as a stopping condition for stopping the condensation prevention apparatus with respect to the surface temperature of the window, and in a case in which a surface temperature of the window at the inside of the chamber after execution of the condensation prevention process is equal to or greater than the condition value, execute a process to control the condensation prevention apparatus and to stop the operation of the condensation prevention apparatus.
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