| CPC G01L 3/102 (2013.01) [G01L 5/169 (2020.01)] | 18 Claims |
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1. A sensor, comprising:
a supporting member;
a permanent magnet that is coupled to the supporting member; and
a sensor die having a plurality of sensing elements and processing circuitry formed thereon, the plurality of sensing elements being arranged to generate signal in response to a pattern of magnetic flux density that is produced by the permanent magnet and modulated by a change in tensile stress in a surface of a shaft, the tensile stress resulting from an application of a twisting force to the shaft, the processing circuitry being configured to translate the signal to a value of the force, and output an indication of the value of the force,
wherein the permanent magnet and the sensor die are encapsulated in an encapsulating material, the encapsulating material being used to form a package of the sensor, and
wherein the plurality of sensing elements are arranged in a bridge circuit, the signal that is translated includes an output of the bridge circuit and the plurality of sensing elements are the only magnetic field sensing elements used in generating the indication of the value of the force.
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