US 12,306,053 B2
Strain gauge including a barrier layer over a resistance body
Tatsuya Takimoto, Nagano (JP); Shintaro Takata, Nagano (JP); Shinya Toda, Nagano (JP); Toshiaki Asakawa, Nagano (JP); and Shigeyuki Adachi, Nagano (JP)
Assigned to MINEBEA MITSUMI Inc., Nagano (JP)
Appl. No. 18/261,351
Filed by MINEBEA MITSUMI Inc., Nagano (JP)
PCT Filed Jan. 13, 2022, PCT No. PCT/JP2022/000985
§ 371(c)(1), (2) Date Jul. 13, 2023,
PCT Pub. No. WO2022/154057, PCT Pub. Date Jul. 21, 2022.
Claims priority of application No. 2021-005495 (JP), filed on Jan. 18, 2021.
Prior Publication US 2023/0400370 A1, Dec. 14, 2023
Int. Cl. G01L 1/22 (2006.01)
CPC G01L 1/2287 (2013.01) 10 Claims
OG exemplary drawing
 
1. A strain gauge comprising:
a flexible substrate;
a resistor made from a film containing Cr, CrN, and Cr2N, on one surface of the substrate;
a barrier layer covering the resistor, the barrier layer being made of resin; and
an insulating stress relaxing layer between the resistor and the barrier layer,
wherein, in the barrier layer, a ratio of moisture permeability (g/m2/24h) to thickness (mm) is 5:1 or greater, and the thickness of the barrier layer is 100 μm or more and 3 mm or less,
wherein the insulating stress relaxing layer is an organic film having a lower Young's modulus than the barrier layer.