US 12,306,052 B2
Pressure sensitive sensor
Masami Watanabe, Chiba (JP)
Assigned to Fujikura Ltd., Tokyo (JP)
Appl. No. 18/041,796
Filed by Fujikura Ltd., Tokyo (JP)
PCT Filed Oct. 11, 2021, PCT No. PCT/JP2021/037561
§ 371(c)(1), (2) Date Feb. 16, 2023,
PCT Pub. No. WO2022/130754, PCT Pub. Date Jun. 23, 2022.
Claims priority of application No. 2020-208233 (JP), filed on Dec. 16, 2020.
Prior Publication US 2023/0296456 A1, Sep. 21, 2023
Int. Cl. G01L 1/22 (2006.01)
CPC G01L 1/2287 (2013.01) 10 Claims
OG exemplary drawing
 
1. A pressure sensitive sensor comprising:
a first substrate;
a resistor disposed on the first substrate;
a first wiring pattern disposed on the first substrate and connected to the resistor;
first comb tooth patterns disposed on the first substrate and individually connected to the resistor;
a pusher comprising:
a pushing part that faces the first comb tooth patterns and moves to the first substrate; and
a connecting body held by the pushing part and electrically connected to the first comb tooth patterns by pushing of the pushing part; and
a second wiring pattern that is either (i) disposed on the first substrate and electrically connected to the connecting body by pushing of the pushing part or (ii) included in the pusher and connected to the connecting body, wherein
a material of the resistor has an electrical resistivity higher than an electrical resistivity of a material of the first wiring pattern, an electrical resistivity of a material of the first comb tooth patterns, an electrical resistivity of a material of the connecting body, and an electrical resistivity of a material of the second wiring pattern,
the resistor does not overlap the connecting body in a plan view, and
a resistance value between the first wiring pattern and the second wiring pattern changes according to a load applied to the pushing part.