US 12,306,036 B2
Optical devices and methods of manufacture
Hua-Kung Chiu, Hsinchu (TW); Jia-Hong Wu, Hsinchu (TW); Hsing-Kuo Hsia, Jhubei (TW); and Chen-Hua Yu, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsinchu (TW)
Filed on Sep. 25, 2023, as Appl. No. 18/473,434.
Prior Publication US 2025/0102353 A1, Mar. 27, 2025
Int. Cl. G01J 1/04 (2006.01)
CPC G01J 1/0437 (2013.01) [G01J 1/0433 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An apparatus comprising:
a notch filter;
an optical signal detector positioned adjacent to the notch filter; and
a mirror positioned adjacent to the notch filter, wherein the notch filter comprises:
a first distributed Bragg reflector (DBR) stack on a substrate;
a defect structure on the first DBR stack; and
a second DBR stack on the defect structure.