US 12,306,029 B2
Aggregation method and processing apparatus
Takashi Asakawa, Iwate (JP); Satoshi Tanaka, Yamanashi (JP); and Ryota Aoi, Hokkaido (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on Mar. 11, 2022, as Appl. No. 17/692,338.
Claims priority of application No. 2021-040448 (JP), filed on Mar. 12, 2021.
Prior Publication US 2022/0291035 A1, Sep. 15, 2022
Int. Cl. G01F 15/06 (2022.01)
CPC G01F 15/068 (2013.01) 9 Claims
OG exemplary drawing
 
1. An aggregation method comprising:
acquiring, by a computer, log information including a measurement value of a force used by each of a plurality of processing apparatuses, a measurement date and time, a number of substrates processed by each of the plurality of processing apparatuses, and a processing date and time, the measurement value being measured by a sensor of each of the plurality of processing apparatuses that processes a substrate;
storing, by the computer, the measurement value of the force, the measurement date and time, the number of processed substrates, and the processing date and time included in the log information acquired in the acquiring, in a memory;
integrating, by the computer, the measurement value of the force associated with the measurement date and time, and the number of processed substrates associated with the processing date and time in a specified aggregation period with reference to the memory, thereby calculating an integrated value of the force for each of the plurality of processing apparatuses and an integrated value of a force per processed substrate based on the integrated value of the force and the integrated value of the number of processed substrates; and
controlling, by the computer, the plurality of processing apparatuses based on the integrated value of the force for each of the plurality of processing apparatuses and the integrated value of the force per processed substrate.