US 12,306,028 B2
Jig for automatically measuring flow rate of reticle carrier
Chin-Hung Wen, New Taipei (TW); Chao-Chin Chin, New Taipei (TW); Keng-Liang Lin, New Taipei (TW); and An-Pang Wang, New Taipei (TW)
Assigned to GUDENG EQUIPMENT CO., LTD., New Taipei (TW)
Filed by GUDENG EQUIPMENT CO., LTD., New Taipei (TW)
Filed on Dec. 30, 2022, as Appl. No. 18/091,413.
Prior Publication US 2024/0219217 A1, Jul. 4, 2024
Int. Cl. G01F 15/061 (2022.01); G03F 7/00 (2006.01); H02J 7/00 (2006.01); H02J 50/10 (2016.01)
CPC G01F 15/061 (2013.01) [G03F 7/70741 (2013.01); H02J 7/0047 (2013.01); H02J 50/10 (2016.02)] 7 Claims
OG exemplary drawing
 
1. A jig for automatically measuring flow rate of a reticle carrier, comprising:
a jig body, having a storage space, at least one gas inlet hole and at least one gas outlet hole communicated to the storage space;
a flow rate detection module, including a flowmeter and a flow indicator electrically connected to the flowmeter, the flowmeter is disposed in the storage space;
a wireless communication module, connected to the flowmeter;
a capacitor, electrically connected to the flow rate detection module and the wireless communication module; and
a wireless charging receiving module, disposed at a bottom of the jig body, and electrically connected to the capacitor.