US 12,305,978 B2
Microcrack-based strain sensing element, preparation method and use thereof
Qian Wang, Suzhou (CN); Zezhong Lu, Suzhou (CN); Kejun Wang, Suzhou (CN); Lei Gao, Suzhou (CN); Cheng Fan, Suzhou (CN); and Lei Zhang, Suzhou (CN)
Assigned to SOOCHOW UNIVERSITY, Suzhou (CN)
Appl. No. 17/799,642
Filed by SOOCHOW UNIVERSITY, Suzhou (CN)
PCT Filed Aug. 10, 2021, PCT No. PCT/CN2021/111707
§ 371(c)(1), (2) Date Aug. 12, 2022,
PCT Pub. No. WO2022/247018, PCT Pub. Date Dec. 1, 2022.
Claims priority of application No. 202110578601.0 (CN), filed on May 26, 2021.
Prior Publication US 2024/0027178 A1, Jan. 25, 2024
Int. Cl. G01L 1/22 (2006.01); A61B 5/00 (2006.01); G01B 7/16 (2006.01)
CPC G01B 7/18 (2013.01) [A61B 5/6824 (2013.01); G01L 1/2293 (2013.01); A61B 2562/0261 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A method for preparing a microcrack-based strain sensing element, comprising steps of:
(1) fabricating a coating template with a corresponding hollow shape according to a shape of a required sensing element, placing the coating template on a substrate layer, and coating a metal film layer formed by deposition of two metal materials on the substrate layer;
(2) fabricating a protective layer template with a pattern of the corresponding hollow shape according to a required crack density and position, and spray-coating a release agent;
(3) fixing the protective layer template to a surface of the metal film layer, and brush-coating a raw material of a protective layer on the protective layer template;
(4) demolding after curing of the protective layer, and arranging an output electrode to obtain a sample sheet;
(5) spin-coating a raw material of a packaging layer on a surface of the sample sheet; and
(6) bending and stretching the metal film layer to obtain a patterned crack structure on a surface of the metal film layer,
wherein the microcrack-based strain sensing element, comprising:
the substrate layer;
the metal film provided on the substrate layer, wherein the metal film is formed by deposition of two metal materials, and the metal film is provided with a patterned crack structure;
the protective layer provided on the metal film;
the output electrode connected to the metal film and configured to output an electrical signal; and
the packaging layer provided on the protective layer.