US 12,305,778 B2
Semiconductor gas pipe fitting fastener
Eunsik Noh, Gimhae-si (KR); and Sunryong Lee, Hwaseong-si (KR)
Assigned to DK-LOK CORPORATION, Gimhae-si (KR)
Appl. No. 18/704,273
Filed by DK-LOK CORPORATION, Gimhae-si (KR)
PCT Filed Aug. 17, 2022, PCT No. PCT/KR2022/012294
§ 371(c)(1), (2) Date Apr. 24, 2024,
PCT Pub. No. WO2023/075106, PCT Pub. Date May 4, 2023.
Claims priority of application No. 10-2021-0147185 (KR), filed on Oct. 29, 2021.
Prior Publication US 2024/0418303 A1, Dec. 19, 2024
Int. Cl. F16L 19/02 (2006.01); F16L 19/00 (2006.01); F16L 19/025 (2006.01)
CPC F16L 19/0218 (2013.01) [F16L 19/005 (2013.01); F16L 19/025 (2013.01); F16L 2201/10 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A semiconductor gas pipe fitting fastener comprising:
a female fitting member connected to a first pipe through which gas that is used in a semiconductor process flows;
a male fitting member connected with the female fitting member by being connected to a second pipe opposite to the first pipe;
a female nut member supporting the female fitting member therein;
a male nut member supporting the male fitting member therein and configured to connect the female fitting member and the male fitting member by being coupled to the female nut member; and
a gasket member supported on a side by the female fitting member, supported on another side by the male fitting member, and configured to prevent leakage of gas from the female fitting member and the male fitting member,
wherein the gasket member includes a protrusion of which a side is exposed outside the female nut member,
a gasket indicator is disposed at the protrusion such that the exposed region of the protrusion is shown, and the gasket indicator is shown to correspond to a material of the gasket member,
a gasket slot in which the gasket member is inserted is formed at the female nut member,
a first indicator and a second indicator are disposed in a region of the female nut member in which the gasket slot is formed, and
the first indicator and the second indicator are shown in different colors, whereby a fastening state of the female nut member is shown.