US 12,305,280 B2
Film forming apparatus and film forming method
Tomoki Ishimaru, Yokkaichi Mie (JP); Masaya Toda, Yokkaichi Mie (JP); Kota Takahashi, Yokkaichi Mie (JP); Kenichiro Toratani, Yokkaichi Mie (JP); and Kazuhiro Matsuo, Kuwana Mie (JP)
Assigned to Kioxia Corporation, Tokyo (JP)
Filed by Kioxia Corporation, Tokyo (JP)
Filed on Dec. 29, 2022, as Appl. No. 18/148,322.
Claims priority of application No. 2022-071288 (JP), filed on Apr. 25, 2022.
Prior Publication US 2023/0340667 A1, Oct. 26, 2023
Int. Cl. C23C 16/455 (2006.01); C23C 16/40 (2006.01); C23C 16/44 (2006.01); C23C 16/52 (2006.01); H01L 21/02 (2006.01)
CPC C23C 16/45548 (2013.01) [C23C 16/407 (2013.01); C23C 16/4412 (2013.01); C23C 16/45527 (2013.01); C23C 16/45565 (2013.01); C23C 16/52 (2013.01); H01L 21/02565 (2013.01); H01L 21/0262 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A film forming method using a film forming apparatus including a chamber including a sidewall, a shower head provided in an upper part of the chamber, a holder provided in the chamber holding a substrate, a first gas supply pipe supplying a first gas to the shower head, a first valve provided in the first gas supply pipe, a gas supply portion provided in a region of the chamber other than the shower head, a second gas supply pipe supplying a second gas to the gas supply portion, a second valve provided in the second gas supply pipe, a gas exhaust pipe exhausting a gas from the chamber, and an exhaust device connected to the gas exhaust pipe, the method comprising:
loading a substrate into the chamber;
placing the substrate on the holder;
driving the exhaust device to reduce a pressure in the chamber;
opening the second valve to supply the second gas containing an inert gas from the second gas supply pipe into the chamber through the gas supply portion;
opening the first valve to supply the first gas containing a metal element into the chamber through the shower head;
closing the second valve;
closing the first valve; and
reducing the pressure in the chamber,
wherein the opening the first valve to start supply of the first gas is performed after a first time passes from the opening the second valve to start supply of the second gas, and the closing the first valve to stop supply of the first gas is performed after a second time passes from the closing the second valve to stop supply of the second gas.