US 12,304,804 B2
Micro-electro-mechanical system fluid control
Johan Bejhed, Uppsala (SE)
Assigned to WATER STUFF & SUN GMBH, Unterschleissheim (DE)
Appl. No. 18/568,850
Filed by Water Stuff & Sun GmbH, Unterschleissheim (DE)
PCT Filed Jun. 15, 2022, PCT No. PCT/EP2022/066267
§ 371(c)(1), (2) Date Dec. 11, 2023,
PCT Pub. No. WO2022/263491, PCT Pub. Date Dec. 22, 2022.
Claims priority of application No. 2150773-6 (SE), filed on Jun. 16, 2021.
Prior Publication US 2024/0279048 A1, Aug. 22, 2024
Int. Cl. B81B 1/00 (2006.01); F16K 99/00 (2006.01); G05D 7/00 (2006.01); B81B 3/00 (2006.01); B81B 7/04 (2006.01); G05D 16/06 (2006.01)
CPC B81B 1/006 (2013.01) [F16K 99/0015 (2013.01); G05D 7/005 (2013.01); B81B 3/0018 (2013.01); B81B 7/04 (2013.01); B81B 2201/054 (2013.01); B81B 2201/058 (2013.01); B81B 2201/10 (2013.01); B81B 2203/0338 (2013.01); B81B 2207/03 (2013.01); F16K 99/0005 (2013.01); F16K 2099/008 (2013.01); G05D 7/00 (2013.01); G05D 16/06 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A fluid-control device, comprising a stack of wafers in which flow components are provided as micro-electro-mechanical systems—MEMS, said flow components being selected from at least one of fluid-control components and fluid-monitor components, wherein a first said flow component is encircled, in a main plane of said stack of wafers, by a second said flow component, wherein
at least two said flow components comprise a respective deformable membrane.