US 12,304,025 B2
Jig for mounting and dismounting processing tool
Minoru Matsuzawa, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Dec. 6, 2022, as Appl. No. 18/062,186.
Claims priority of application No. 2021-210151 (JP), filed on Dec. 24, 2021.
Prior Publication US 2023/0201996 A1, Jun. 29, 2023
Int. Cl. B24B 41/047 (2006.01); B24B 41/06 (2012.01); B24B 45/00 (2006.01); B24B 49/08 (2006.01)
CPC B24B 41/047 (2013.01) [B24B 41/061 (2013.01); B24B 45/003 (2013.01); B24B 49/08 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A jig for mounting a processing tool on a mount of a processing apparatus,
the processing apparatus including
a chuck table having a holding surface for holding a workpiece thereon,
a spindle being disposed above the holding surface of the chuck table and having a distal end portion to which the mount for supporting the processing tool mounted thereon is fixed, and
a seat structure disposed around the chuck table,
the jig comprising:
a first support for supporting the processing tool thereon;
a second support positioned below the first support and supported on the seat structure; and
a main body disposed between the first support and the second support, wherein
the main body includes
a balloon that is expandable when gas is introduced thereinto and that is collapsible when the gas is discharged therefrom,
an inlet port for introducing the gas therethrough into the balloon, and
an outlet port for discharging the gas therethrough from the balloon, and
the balloon with the processing tool supported on the first support is able to be expanded to move the processing tool toward the mount.