US 12,303,947 B2
Apparatus for cleaning mask
Jai Phoong Kim, Yongin-si (KR); Jae Hoon Lee, Yongin-si (KR); Hyuk Kang, Yongin-si (KR); Chang Uk An, Yongin-si (KR); Han Geul Lim, Yongin-si (KR); and Byung Jin Choi, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Feb. 22, 2023, as Appl. No. 18/112,716.
Claims priority of application No. 10-2022-0066519 (KR), filed on May 31, 2022.
Prior Publication US 2023/0381832 A1, Nov. 30, 2023
Int. Cl. B08B 3/12 (2006.01)
CPC B08B 3/12 (2013.01) [B08B 2203/007 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A mask cleaning apparatus comprising:
a cleaning bath including an accommodating space in which a cleaning solution is stored;
a transfer robot transferring a mask; and
an induction heating member disposed inside the accommodating space, wherein
the cleaning bath includes at least one side and a bottom surface, which define the accommodating space, and
the induction heating member includes:
a first heating member;
a second heating member; and
a waterproof layer covering the first heating member and the second heating member.