US 12,303,946 B2
Ultrasonically activated water ejector
Xiaoming Qiu, Tokyo (JP)
Assigned to DISCO CORPORATION, Tokyo (JP)
Filed by DISCO CORPORATION, Tokyo (JP)
Filed on Nov. 16, 2022, as Appl. No. 18/056,108.
Claims priority of application No. 2021-196295 (JP), filed on Dec. 2, 2021.
Prior Publication US 2023/0173552 A1, Jun. 8, 2023
Int. Cl. B08B 3/12 (2006.01); B05B 1/08 (2006.01); B05B 17/06 (2006.01); B08B 3/02 (2006.01); B08B 13/00 (2006.01); B08B 17/06 (2006.01); H01L 21/67 (2006.01); H01L 21/683 (2006.01)
CPC B08B 3/12 (2013.01) [B05B 1/086 (2013.01); B08B 3/02 (2013.01); B08B 13/00 (2013.01); B08B 17/06 (2013.01); H01L 21/67051 (2013.01); H01L 21/6838 (2013.01); B08B 2203/0288 (2013.01)] 5 Claims
OG exemplary drawing
 
1. An ultrasonically activated water ejector for ejecting ultrasonically activated water with ultrasonic vibrations propagated thereto, comprising:
a cylindrical water reservoir section configured to temporarily hold water supplied from a water supply source;
an ejection nozzle that ejects the water from a lower part of the water reservoir section;
a dome-shaped ultrasonic vibration plate disposed in an upper part of the water reservoir section, facing the ejection nozzle, and having a concave spherical surface on a lower side thereof; and
a water supply portion having a supply inlet configured to be a slit which extends obliquely through a vertical sidewall of the cylindrical water reservoir section to supply the water along the concave spherical surface into the water reservoir section from an outer periphery toward a center of the ultrasonic vibration plate,
wherein the water is supplied from the supply inlet to the water reservoir section in an amount greater than the water to be ejected from the ejection nozzle,
the water flows along the concave spherical surface from an outer periphery toward a center of the concave spherical surface, and is held in the water reservoir section, and
the ultrasonically activated water is obtained by propagating ultrasonic vibrations from the ultrasonic vibration plate to the water held in the water reservoir section, and is ejected from the ejection nozzle.