US 12,303,930 B2
Method for manufacturing high-density in-line carbon nanotube thin film
Jie Han, Beijing (CN); and Hui Wang, Beijing (CN)
Assigned to BEIJING HUA TAN YUAN XIN ELECTRONICS TECHNOLOGY CO., LTD, Beijing (CN); and BEIJING INSTITUTE OF CARBON-BASED INTERGRATED CIRCUIT, Beijing (CN)
Appl. No. 17/640,219
Filed by BEIJING HUA TAN YUAN XIN ELECTRONICS TECHNOLOGY CO., LTD, Beijing (CN); and BEIJING INSTITUTE OF CARBON-BASED INTEGRATED CIRCUIT, Beijing (CN)
PCT Filed Sep. 4, 2020, PCT No. PCT/CN2020/113380
§ 371(c)(1), (2) Date Mar. 3, 2022,
PCT Pub. No. WO2021/043235, PCT Pub. Date Mar. 11, 2021.
Claims priority of application No. 201910831548.3 (CN), filed on Sep. 4, 2019; application No. 201910831550.0 (CN), filed on Sep. 4, 2019; application No. 201910831824.6 (CN), filed on Sep. 4, 2019; and application No. 201910831831.6 (CN), filed on Sep. 4, 2019.
Prior Publication US 2022/0332584 A1, Oct. 20, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. B32B 9/00 (2006.01); B05C 3/02 (2006.01); B05D 1/18 (2006.01); B05D 7/24 (2006.01); C01B 32/159 (2017.01); C01B 32/168 (2017.01); C01B 32/17 (2017.01); C01B 32/174 (2017.01); H10K 85/20 (2023.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); G03F 7/039 (2006.01); H10K 71/13 (2023.01)
CPC B05C 3/02 (2013.01) [B05D 1/18 (2013.01); B05D 7/24 (2013.01); C01B 32/159 (2017.08); C01B 32/168 (2017.08); C01B 32/17 (2017.08); C01B 32/174 (2017.08); H10K 85/221 (2023.02); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01); C01B 2202/02 (2013.01); C01B 2202/04 (2013.01); C01B 2202/06 (2013.01); C01B 2202/08 (2013.01); G03F 7/039 (2013.01); H10K 71/13 (2023.02); Y10T 428/30 (2015.01)] 12 Claims
OG exemplary drawing
 
1. A method for forming a carbon nanotube film, comprising:
injecting a carbon nanotube solution and a filling medium into a container, wherein the filling medium comprises a solid substance comprising molecular sieves, polytetrafluoroethylene balls, and glass ball fillers;
clamping a substrate on a pulling machine;
immersing the substrate vertically in the carbon nanotube solution;
injecting, along the substrate or a sidewall of the container, a sealing liquid that is immiscible with the carbon nanotube solution;
pulling the substrate up to form a carbon nanotube film on the substrate, wherein the carbon nanotube film is parallel to an interface between the sealing liquid and the carbon nanotube solution.