CPC H01L 24/85 (2013.01) [H01L 23/66 (2013.01); H01L 24/45 (2013.01); H01L 24/48 (2013.01); H01L 24/73 (2013.01); H01L 2223/6611 (2013.01); H01L 2223/6655 (2013.01); H01L 2223/6677 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/45015 (2013.01); H01L 2224/45139 (2013.01); H01L 2224/45144 (2013.01); H01L 2224/45147 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48159 (2013.01); H01L 2224/48227 (2013.01); H01L 2224/48465 (2013.01); H01L 2224/48644 (2013.01); H01L 2224/48844 (2013.01); H01L 2224/73265 (2013.01); H01L 2224/85444 (2013.01); H01L 2924/00011 (2013.01); H01L 2924/00012 (2013.01); H01L 2924/01015 (2013.01); H01L 2924/01047 (2013.01); H01L 2924/10329 (2013.01); H01L 2924/12042 (2013.01); H01L 2924/1305 (2013.01); H01L 2924/13051 (2013.01); H01L 2924/1421 (2013.01); H01L 2924/1423 (2013.01); H01L 2924/19041 (2013.01); H01L 2924/19042 (2013.01); H01L 2924/19105 (2013.01); H01L 2924/3011 (2013.01); H05K 1/0243 (2013.01); H05K 3/244 (2013.01); H05K 2201/0341 (2013.01)] | 20 Claims |
1. A radio frequency module comprising:
a first radio frequency component that provides a radio frequency signal;
a radio frequency transmission line including a conductive layer and a finish plating on the conductive layer, the finish plating including a gold layer having a surface that receives the radio frequency signal, a palladium layer proximate the gold layer, and a nickel layer proximate the palladium layer, the nickel layer having a thickness that is less than a skin depth of the nickel layer at 1.9 GHz; and
a second radio frequency component that receives the radio frequency signal from the first radio frequency component via at least the radio frequency transmission line.
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