US 11,984,409 B2
Photoelectric conversion panel
Fumiki Nakano, Sakai (JP); Makoto Nakazawa, Sakai (JP); Hiroyuki Moriwaki, Sakai (JP); and Rikiya Takita, Sakai (JP)
Assigned to SHARP KABUSHIKI KAISHA, Sakai (JP)
Filed by SHARP KABUSHIKI KAISHA, Sakai (JP)
Filed on Aug. 5, 2021, as Appl. No. 17/394,794.
Claims priority of provisional application 63/063,620, filed on Aug. 10, 2020.
Prior Publication US 2022/0045019 A1, Feb. 10, 2022
Int. Cl. H01L 23/00 (2006.01); H01L 27/146 (2006.01)
CPC H01L 23/564 (2013.01) [H01L 27/14643 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A photoelectric conversion panel comprising:
a thin-film transistor provided in a first region;
a photoelectric conversion element provided in the first region and formed at a higher layer than the thin-film transistor;
a first organic film covering the thin-film transistor and having a first groove portion provided in a second region differing from the first region;
a second organic film covering the photoelectric conversion element and having a second groove portion provided in the second region and in a position different from that of the first groove portion in a plan view;
a first inorganic film formed so as to cover the first organic film and cover an inner surface of the first groove portion;
a second inorganic film formed so as to cover the second organic film and cover an inner surface of the second groove portion; and
a protection element electrically connected to at least one of the thin-film transistor and the photoelectric conversion element and provided in the second region, wherein
the first inorganic film has a first opening formed in a position above the protection element,
the second inorganic film has a second opening formed in a position above the protection element,
the first groove portion has a frame shape surrounding both the first opening and the second opening in the plan view, and
the second groove portion has, in the plan view, a frame shape surrounding both the first opening and the second opening within or outside the first groove portion having the frame shape.