| CPC H01L 21/6773 (2013.01) [B66C 19/00 (2013.01); H01L 21/67736 (2013.01)] | 19 Claims |
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1. A substrate transfer system comprising:
a lower rail;
an upper rail which is located to above the lower rail from a ground plane, and extends to be parallel to the lower rail;
a conveyor which extends to intersect the lower rail and the upper rail, below the lower rail;
a first lower transport unit which transports a first carrier along the lower rail between a first facility and an interface zone and unloads the first carrier onto the conveyor;
a first upper transport unit which transports a second carrier along the upper rail between the first facility and the interface zone and unloads the second carrier onto the conveyor;
a second lower transport unit which transports the first carrier along the lower rail between a second facility and the interface zone and loads the first carrier from the conveyor; and
a second upper transport unit which transports the second carrier along the upper rail between the second facility and the interface zone and loads the second carrier from the conveyor,
wherein the conveyor includes a linear module and a turning module, wherein the linear module moves the first carrier and the second carrier in a linear direction, and wherein the turning module rotates to turn the first carrier and the second carrier, and
wherein the linear module includes a first linear module in which the first carrier and the second carrier are loaded from the first lower transport unit and the first upper transport unit in the interface zone, and a second linear module in which the first carrier and the second carrier are unloaded into the second lower transport unit and the second upper transport unit in the interface zone.
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