US 11,984,333 B2
Methods and systems for temperature control for a substrate
Paul Zachary Wirth, Kalispell, MT (US); Kiyki-Shiy Shang, Mountain House, CA (US); and Mikhail Taraboukhine, Pleasanton, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Jan. 5, 2023, as Appl. No. 18/093,763.
Application 18/093,763 is a continuation of application No. 16/867,362, filed on May 5, 2020, granted, now 11,551,951.
Prior Publication US 2023/0154773 A1, May 18, 2023
Int. Cl. H01L 21/67 (2006.01)
CPC H01L 21/67248 (2013.01) [H01L 21/67017 (2013.01); H01L 21/67103 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
supplying a direct current (DC) power to heating elements embedded in each of a plurality of zones of a substrate support assembly included in a processing chamber;
determining, based on a voltage measured across the heating elements and a current measured through the heating elements as the DC power is supplied to the heating elements, that a temperature of the substrate support assembly does not satisfy a temperature condition associated with a process recipe for a process at the processing chamber;
identifying, based on the measured voltage and measured current across the heating elements, a zone of the plurality of zones that is at a temperature that does not correspond to a target temperature for the zone based on the temperature condition; and
modifying the DC power supplied to the heating elements embedded within the identified zone to cause the temperature of the zone to be modified to the target temperature and the temperature of the substrate support assembly to satisfy the temperature condition.