| CPC H01J 37/32477 (2013.01) [H01J 37/32715 (2013.01); H01J 37/32862 (2013.01)] | 20 Claims |
|
1. A deposition apparatus comprising:
a chamber including a lower portion and a side wall;
a support member located in a space defined by the lower portion of the chamber and the side wall of the chamber, and including a first side surface;
a ground member disposed between the support member and the lower portion of the chamber; and
a first fixing member including:
a first body located under a first end portion of the ground member and including a first side surface, and
a first blocking part located on the first side surface of the first body and the first side surface of the support member,
wherein the first end portion of the ground member directly contacts a bottom surface of the support member, and
wherein the first blocking part extends along the first side surface of the support member, and shields the first end portion of the ground member from view.
|