US 11,984,294 B2
Emitter, electron gun in which same is used, electronic device in which same is used, and method for manufacturing same
Jie Tang, Ibaraki (JP); Shuai Tang, Ibaraki (JP); Ta-Wei Chiu, Ibaraki (JP); Wataru Hayami, Ibaraki (JP); and Luchang Qin, Ibaraki (JP)
Assigned to NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Ibaraki (JP)
Appl. No. 17/622,994
Filed by NATIONAL INSTITUTE FOR MATERIALS SCIENCE, Ibaraki (JP)
PCT Filed Jun. 29, 2020, PCT No. PCT/JP2020/025435
§ 371(c)(1), (2) Date Dec. 27, 2021,
PCT Pub. No. WO2021/002305, PCT Pub. Date Jan. 7, 2021.
Claims priority of application No. 2019-123570 (JP), filed on Jul. 2, 2019.
Prior Publication US 2024/0079198 A1, Mar. 7, 2024
Int. Cl. H01J 37/065 (2006.01)
CPC H01J 37/065 (2013.01) [H01J 2237/06316 (2013.01); H01J 2237/06341 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An emitter comprising a nanowire,
wherein the nanowire is made of a hafnium carbide (HfC) single crystal,
at least an end of the nanowire, through which electrons are to be emitted, is coated with hafnium oxycarbide (HfC1-xOx: 0<x≤0.5), and
a field electron emission pattern of the end obtained by a field emission microscope (FEM) is a single spot.