US 11,982,947 B2
Contamination trap
Sander Catharina Reinier Derks, Budel (NL); Daniel Jozef Maria Direcks, Simpelveld (NL); Maurice Wilhelmus Leonardus Hendricus Feijts, Beek (NL); Pieter Gerardus Mathijs Hoeijmakers, Veldhoven (NL); Katja Cornelia Joanna Clasina Moors, Eindhoven (NL); Violeta Navarro Paredes, Eindhoven (NL); William Peter Van Drent, Best (NL); and Jan Steven Christiaan Westerlaken, Heesch (NL)
Assigned to ASML NETHERLAND B.V., Veldhoven (NI)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Nov. 28, 2022, as Appl. No. 18/070,155.
Application 18/070,155 is a continuation of application No. 17/603,687, granted, now 11,556,067, previously published as PCT/EP2020/056344, filed on Mar. 10, 2020.
Claims priority of application No. 19169778 (EP), filed on Apr. 17, 2019.
Prior Publication US 2023/0091648 A1, Mar. 23, 2023
Int. Cl. G03F 7/00 (2006.01); H05G 2/00 (2006.01)
CPC G03F 7/70916 (2013.01) [G03F 7/70033 (2013.01); G03F 7/70891 (2013.01); H05G 2/005 (2013.01); H05G 2/008 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A contamination trap comprising:
a plurality of vanes arranged to form a truncated cone, a tube, or a hollow frustum, with a central longitudinal axis and defining an internal surface of the contamination trap, each vane comprising a first portion and a second portion,
wherein the first portion comprises a surface;
wherein the first portion has a vertex that extends away from the second portion and points toward the central longitudinal axis;
wherein at least one vane comprises a material and a further material;
wherein the material and the further material form a diffusion layer;
wherein the material and the further material have substantially the same rate of thermal expansion and the material comprises a thermal conductivity greater than a thermal conductivity of the further material;
wherein the surface of the first portion comprises the further material; and
wherein the contamination trap is configured to trap fuel debris emitted from a plasma formation region of a radiation source.