US 11,982,945 B2
Two-photon-polymerization laser direct writing system based on acousto-optic deflector
Wei Xiong, Wuhan (CN); Binzhang Jiao, Wuhan (CN); Hui Gao, Wuhan (CN); Yuncheng Liu, Wuhan (CN); Xuhao Fan, Wuhan (CN); and Leimin Deng, Wuhan (CN)
Assigned to HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY, Wuhan (CN)
Filed by HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY, Wuhan (CN)
Filed on Oct. 14, 2021, as Appl. No. 17/501,183.
Claims priority of application No. 202110025338.2 (CN), filed on Jan. 8, 2021; and application No. 202110045996.8 (CN), filed on Jan. 14, 2021.
Prior Publication US 2022/0221796 A1, Jul. 14, 2022
Int. Cl. G03F 7/20 (2006.01); B33Y 30/00 (2015.01); G02B 5/04 (2006.01); G02B 27/00 (2006.01); G02B 27/09 (2006.01); G02F 1/33 (2006.01); G03F 7/00 (2006.01)
CPC G03F 7/2053 (2013.01) [G02B 5/04 (2013.01); G02B 27/0031 (2013.01); G02B 27/0966 (2013.01); G02F 1/33 (2013.01); G03F 7/70375 (2013.01); G03F 7/70383 (2013.01); B33Y 30/00 (2014.12)] 18 Claims
OG exemplary drawing
 
1. A two-photon-polymerization laser direct writing system based on an acousto-optic deflector, comprising: an ultrafast laser device, a beam expander, a scanning field center angular dispersion compensator, a two-dimensional acousto-optic deflector, a scanning field edge angular dispersion compensator, an astigmatism compensator and a focusing objective lens,
wherein the ultrafast laser device is configured to emit an ultrafast laser;
the beam expander is configured to conduct collimation and beam expansion on the ultrafast laser; the ultrafast laser subjected to the collimation and beam expansion passes through the scanning field center angular dispersion compensator and the two-dimensional acousto-optic deflector in sequence;
the scanning field center angular dispersion compensator is configured to conduct precompensation on an angular dispersion at a center of a scanning field of the two-dimensional acousto-optic deflector according to parameters of the two-dimensional acousto-optic deflector;
the two-dimensional acousto-optic deflector is configured to deflect, by a predetermined angle, the ultrafast laser subjected to the precompensation on the angular dispersion at the center of the scanning field, so as to make the laser deflected meet a laser direct writing requirement; the two-dimensional acousto-optic deflector includes two one-dimensional acousto-optic deflectors which are orthogonal to each other;
the ultrafast laser deflected by the two-dimensional acousto-optic deflector passes the scanning field edge angular dispersion compensator and the astigmatism compensator in sequence, and the scanning field edge angular dispersion compensator is configured to compensate for an angular dispersion at an edge of the scanning field of the two-dimensional acousto-optic deflector; the astigmatism compensator is configured to compensate for astigmatism generated in a process of deflecting the ultrafast laser by the two-dimensional acousto-optic deflector; and
the focusing objective lens is configured to conduct tight-focusing on the ultrafast laser subjected to the compensation by the astigmatism compensator and then emit the ultrafast laser to a light-sensitive material, so as to conduct a two-photon-polymerization laser direct writing on the light-sensitive material, and the predetermined angle is controlled by the two-dimensional acousto-optic deflector, so as to realize the two-photon-polymerization laser direct writing on different positions of the light-sensitive material.