US 11,982,940 B2
Photoacid generator, photoresist composition including the same, and method of preparing the photoacid generator
Eunkyung Lee, Seoul (KR); Sumin Kim, Suwon-si (KR); Hyunwoo Kim, Seongnam-si (KR); Juhyeon Park, Hwaseong-si (KR); Giyoung Song, Asan-si (KR); Sukkoo Hong, Suwon-si (KR); Yoonhyun Kwak, Seoul (KR); Youngmin Nam, Seoul (KR); Byunghee Sohn, Yongin-si (KR); Sunyoung Lee, Seoul (KR); Aram Jeon, Seoul (KR); and Sungwon Choi, Hwaseong-si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on May 8, 2023, as Appl. No. 18/313,555.
Application 18/313,555 is a continuation of application No. 17/238,355, filed on Apr. 23, 2021, granted, now 11,693,315.
Claims priority of application No. 10-2020-0163340 (KR), filed on Nov. 27, 2020.
Prior Publication US 2023/0324791 A1, Oct. 12, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G03F 7/004 (2006.01); C07C 309/12 (2006.01); C07C 381/12 (2006.01); C07D 333/76 (2006.01); G03F 7/038 (2006.01); G03F 7/039 (2006.01)
CPC G03F 7/0045 (2013.01) [C07C 309/12 (2013.01); C07C 381/12 (2013.01); C07D 333/76 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); C07C 2603/74 (2017.05)] 21 Claims
OG exemplary drawing
 
1. A photoacid generator comprising
a cation represented by Formula 3 and
a counter anion,

OG Complex Work Unit Chemistry
wherein, in Formula 3,
R1′, R2′, R3′, R4′, and R5′ are each independently a hydrogen atom, a halogen atom, a C1-C20 alkyl group, or a C1-C20 haloalkyl group,
R6′, R7′, R8′, R9′, R10′, R11′, R12′, R13′, R14′, and R15′ are each independently a hydrogen atom, a halogen atom, a hydroxy group, a cyano group, a substituted or unsubstituted C1-C30 alkyl group, a substituted or unsubstituted C1-C30 alkoxy group, a substituted or unsubstituted C3-C30 cycloalkyl group, a substituted or unsubstituted C6-C30 aryl group, or a substituted or unsubstituted C6-C30 heteroaryl group, or R10′ and R11′ join to form a ring system, and
at least two of R6′, R7′, R8′, R9′, R12′, R13′, R14′, and R15′ are iodine atoms.