CPC G03F 7/0045 (2013.01) [C07C 309/12 (2013.01); C07C 381/12 (2013.01); C07D 333/76 (2013.01); G03F 7/038 (2013.01); G03F 7/039 (2013.01); C07C 2603/74 (2017.05)] | 21 Claims |
1. A photoacid generator comprising
a cation represented by Formula 3 and
a counter anion,
![]() wherein, in Formula 3,
R1′, R2′, R3′, R4′, and R5′ are each independently a hydrogen atom, a halogen atom, a C1-C20 alkyl group, or a C1-C20 haloalkyl group,
R6′, R7′, R8′, R9′, R10′, R11′, R12′, R13′, R14′, and R15′ are each independently a hydrogen atom, a halogen atom, a hydroxy group, a cyano group, a substituted or unsubstituted C1-C30 alkyl group, a substituted or unsubstituted C1-C30 alkoxy group, a substituted or unsubstituted C3-C30 cycloalkyl group, a substituted or unsubstituted C6-C30 aryl group, or a substituted or unsubstituted C6-C30 heteroaryl group, or R10′ and R11′ join to form a ring system, and
at least two of R6′, R7′, R8′, R9′, R12′, R13′, R14′, and R15′ are iodine atoms.
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