US 11,982,937 B2
Reticle pod provided with optically identifiable marks and method for identifying the same
Chia-Ho Chuang, New Taipei (TW); Hsing-Min Wen, New Taipei (TW); Yi-Hsuan Lee, New Taipei (TW); Hsin-Min Hsueh, New Taipei (TW); and Ming-Chien Chiu, New Taipei (TW)
Assigned to GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW)
Filed by GUDENG PRECISION INDUSTRIAL CO., LTD., New Taipei (TW)
Filed on Jan. 12, 2021, as Appl. No. 17/146,732.
Claims priority of provisional application 63/024,595, filed on May 14, 2020.
Prior Publication US 2021/0357601 A1, Nov. 18, 2021
Int. Cl. G03F 1/66 (2012.01); B65D 81/24 (2006.01); B65D 85/30 (2006.01); G03F 1/22 (2012.01); G03F 7/00 (2006.01); G06K 7/14 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01)
CPC G03F 1/66 (2013.01) [B65D 81/24 (2013.01); B65D 85/30 (2013.01); G03F 1/22 (2013.01); G03F 7/70741 (2013.01); G06K 7/14 (2013.01); H01L 21/67294 (2013.01); H01L 21/67353 (2013.01); H01L 21/67359 (2013.01); H01L 21/67366 (2013.01); H01L 21/67376 (2013.01); H01L 21/67386 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A reticle pod including a base and a lid engaging with the base, characterized in that:
the base has a bottom surface that is provided with at least one first mark and at least one second mark, the first mark has a first reflectivity relative to a light source, the second mark has a second reflectivity relative to the light source, and the first reflectivity is different from the second reflectivity,
wherein the at least one first mark having the first reflectivity is configured to reflect the light source in order to generate a first voltage value, and the at least one second mark having the second reflectivity is configured to reflect the light source in order to generate a second voltage value,
wherein the first voltage value and the second voltage value are substantially distinct in order to respectively associate with a first message and a second message distinct from the first message.