US 11,982,788 B2
Method for forming nanostructures on a surface and optical element
Vitaliy Shklover, Heidenheim (DE); and Alexandra Pazidis, Essingen-Lautenburg (DE)
Assigned to CARL ZEISS SMT GMBH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Jun. 7, 2021, as Appl. No. 17/341,239.
Application 17/341,239 is a continuation of application No. PCT/EP2019/083628, filed on Dec. 4, 2019.
Claims priority of application No. 10 2018 221 189.2 (DE), filed on Dec. 7, 2018.
Prior Publication US 2021/0293996 A1, Sep. 23, 2021
Int. Cl. G02B 1/12 (2006.01); B82Y 20/00 (2011.01); B82Y 30/00 (2011.01); B82Y 40/00 (2011.01); C23C 14/24 (2006.01); C23C 16/02 (2006.01); G02B 1/113 (2015.01); G02B 1/118 (2015.01)
CPC G02B 1/12 (2013.01) [C23C 14/24 (2013.01); C23C 16/0245 (2013.01); G02B 1/113 (2013.01); G02B 1/118 (2013.01); B82Y 20/00 (2013.01); B82Y 30/00 (2013.01); B82Y 40/00 (2013.01)] 17 Claims
OG exemplary drawing
 
1. A method for forming nanostructures on a surface of a crystalline substrate for transmission of radiation in the far-ultraviolet/vacuum-ultraviolet (FUV/VUV) wavelength range, comprising:
providing a surface, which surface is not oriented along a lattice plane having a minimum surface energy, on the substrate or on a layer formed from a fluoridic crystal applied to the substrate by a coating method, and
introducing an energy input into the surface for rearranging the surface to form the nanostructures, wherein the energy input is generated by directly irradiating the surface with electromagnetic radiation.