US 11,982,659 B2
System, method and program for calibrating moisture sensor
Takamitsu Iwaya, Sendai (JP); Shingo Akao, Sendai (JP); Tatsuhiro Okano, Sendai (JP); Nobuo Takeda, Sendai (JP); Toshihiro Tsuji, Sendai (JP); Toru Oizumi, Sendai (JP); Hideyuki Fukushi, Sendai (JP); Maki Sugawara, Sendai (JP); Yusuke Tsukahara, Sendai (JP); and Kazushi Yamanaka, Sendai (JP)
Assigned to Ball Wave Inc., Sendai (JP)
Filed by Ball Wave Inc., Sendai (JP)
Filed on Aug. 9, 2021, as Appl. No. 17/397,723.
Application 17/397,723 is a continuation of application No. PCT/JP2020/009893, filed on Mar. 6, 2020.
Claims priority of provisional application 62/815,379, filed on Mar. 8, 2019.
Prior Publication US 2021/0372978 A1, Dec. 2, 2021
Int. Cl. G01N 33/00 (2006.01)
CPC G01N 33/0008 (2013.01) [G01N 33/0036 (2013.01); G01N 33/0062 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A system for calibrating a moisture sensor comprising a processing unit, the processing unit including:
a logic circuit configured to obtain reference data, which indicate temporal variation of moisture concentrations, after injecting water-vapor with known concentrations into an analyzer;
a logic circuit configured to measure subject data indicating temporal variation of output-responses of a subject sensor element of the analyzer under test, the subject data are obtained under the same condition with the reference data was obtained;
a logic circuit configured to compare the subject data with the reference data, with same time-duration for obtaining the reference data, the time-duration is measured from a timing at which the water-vapor with the known concentrations is injected for calculating relationships between the output-responses of the subject sensor element and the known concentrations;
an injector configured to inject a constant volume of a calibration gas;
an inlet configured to receive a tip of the injector;
a flowmeter configured to control a flow rate of a background gas;
a moisture sensor configured to accept the subject sensor element, an output of the moisture sensor is connected to the processing unit;
a first pipe for introducing the background gas to the flowmeter;
a second pipe connecting the flowmeter with the inlet, configured to flow the background gas at a controlled flow rate by the flowmeter; and
a third pipe connecting the inlet with the moisture sensor, configured to introduce the background gas and the calibration gas into the moisture sensor.