a first substrate, a second substrate, and a third substrate which are stacked in a thickness direction;

an undiluted solution introduction flow path which has an undiluted solution introduction port and which includes a first part having a first groove part provided on at least one of the first substrate or the second substrate;

a second part which includes a second groove part provided on at least one of the second substrate or the third substrate;

a third part which includes a third groove part provided on the second substrate along with the thickness direction and that that connects together the first part and the second part at each of positions at both end sides;

a first circulation flow path which includes a groove part having an annular shape and having: a first shared part that shares a part of a flow path with the undiluted solution introduction flow path; and a first non-shared part which is not shared with the undiluted solution introduction flow path and which is connected to a diluting solution introduction port; and

a second circulation flow path which is provided independently of the first circulation flow path and which includes a groove part having an annular shape and having: a second shared part that shares a part of the flow path with the undiluted solution introduction flow path; and a second non-shared part which is not shared with the undiluted solution introduction flow path and which is connected to the diluting solution introduction port,

wherein the undiluted solution introduction flow path comprises a plurality of valves wherein the first shared part is connected to the second shared part via a connection valve of the plurality of the valves, and

in the first circulation flow path and the second circulation flow path, a volume ratio of the first shared part and the first non-shared part is different from a volume ratio of the second shared part and the second non-shared part,

the third substrate is stacked on the second substrate at an opposite side of the first substrate,

and further wherein

the first and/or second non-shared part includes:

the first part that includes the first groove part which is provided on at least one of the first substrate or the second substrate and which is connected to the first and/or second shared part;

the second part that includes the second groove part which is provided on at least one of the second substrate or the third substrate;

and the third part penetrates through the second substrate in the thickness direction and that connects together the first part and the second part at each of positions at both end sides.