US 11,982,359 B2
Isolation valve
Benjamin Riordon, Newburyport, MA (US); Anantha K. Subramani, San Jose, CA (US); and Charles T. Carlson, Austin, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jul. 22, 2020, as Appl. No. 16/936,012.
Claims priority of provisional application 62/881,181, filed on Jul. 31, 2019.
Prior Publication US 2021/0033197 A1, Feb. 4, 2021
Int. Cl. F16K 1/20 (2006.01); F16K 49/00 (2006.01); H01L 21/67 (2006.01)
CPC F16K 1/2042 (2013.01) [F16K 1/2007 (2013.01); F16K 49/005 (2013.01); H01L 21/67017 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An isolation valve, comprising:
a valve body defining:
a first fluid volume,
a second fluid volume,
a bottom wall defining a seating surface and an outlet port that is fluidly coupled with the second fluid volume,
a shielding gas inlet that is fluidly coupled with the first fluid volume,
a first sidewall defining a first aperture and a second sidewall opposite to the first sidewall,
wherein the second sidewall defines a second aperture; and
a flapper assembly having a flapper disposed inside the valve body having a flapper surface complimentary to the seating surface, and a flapper shaft, wherein the flapper is pivotable within the valve body to a first position such that the flapper surface is away from the seating surface to allow fluid flow between the first fluid volume and the second fluid volume, wherein the flapper is further pivotable within the valve body to a fully pivoted position such that the flapper surface is parallel and proximate to the seating surface and planar across the outlet port to form a non-contact seal to restrict fluid flow between the first fluid volume and the second fluid volume to a low flow conductance, and wherein a first end portion of the flapper shaft is coupled with the first aperture and a second end portion of the flapper shaft is coupled with the second aperture.