US 11,981,995 B2
Chemical supply apparatus, method for removing particles from chemical, nozzle unit, and substrate treating apparatus
Yong Hoon Hong, Seoul (KR); Dohyeon Yoon, Chungcheongnam-do (KR); Heehwan Kim, Sejong-si (KR); Ji Young Lee, Chungcheongnam-do (KR); and Young Su Kim, Chungcheongnam-do (KR)
Assigned to SEMES CO., LTD., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Chungcheongnam-do (KR)
Filed on Oct. 30, 2020, as Appl. No. 17/086,061.
Claims priority of application No. 10-2019-0137065 (KR), filed on Oct. 31, 2019.
Prior Publication US 2021/0130951 A1, May 6, 2021
Int. Cl. C23C 16/448 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/52 (2006.01); H01L 21/67 (2006.01); B05B 5/00 (2006.01); B05B 5/053 (2006.01)
CPC C23C 16/4485 (2013.01) [C23C 16/4412 (2013.01); C23C 16/45563 (2013.01); C23C 16/52 (2013.01); H01L 21/67 (2013.01); B05B 5/002 (2013.01); B05B 5/0533 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A chemical supply apparatus comprising:
an evaporation unit disposed downstream of a chemical supply source to vaporize supplied chemical thereto;
a filter unit disposed downstream of the evaporation unit, wherein the filter unit filters impurities in the vaporized chemical while the vaporized chemical passes through the filter unit;
a liquefaction unit disposed downstream of the filter unit to liquefy the vaporized chemical;
a chemical storage tank disposed downstream of the liquefaction unit to store the liquefied chemical therein; and
an electrode disposed at least in the evaporation unit,
wherein the electrode electrically reacts with the chemical or particles in the chemical to change electrical properties of the chemical or the particles.