	US 11,981,993 B2
	Forming method of component and substrate processing system
Michishige Saito, Miyagi (JP); Kazuya Nagaseki, Miyagi (JP); and Shota Kaneko, Miyagi (JP)
Assigned to TOKYO ELECTRON LIMITED, Tokyo (JP)
Appl. No. 16/646,277
Filed by Tokyo Electron Limited, Tokyo (JP)
PCT Filed May 10, 2019, PCT No. PCT/JP2019/018735 § 371(c)(1), (2) Date Mar. 11, 2020, PCT Pub. No. WO2019/221023, PCT Pub. Date Nov. 21, 2019.
Claims priority of application No. 2018-094129 (JP), filed on May 15, 2018.
Prior Publication US 2021/0366697 A1, Nov. 25, 2021
Int. Cl. C23C 16/44 (2006.01); B23K 26/144 (2014.01); B23K 26/34 (2014.01); B33Y 10/00 (2015.01); B33Y 50/00 (2015.01); B33Y 80/00 (2015.01); C23C 16/48 (2006.01); H01J 37/32 (2006.01)

CPC C23C 16/4404 (2013.01) [B23K 26/144 (2015.10); B23K 26/34 (2013.01); B33Y 10/00 (2014.12); B33Y 80/00 (2014.12); C23C 16/44 (2013.01); C23C 16/483 (2013.01); C23C 16/487 (2013.01); H01J 37/32477 (2013.01); H01J 37/32642 (2013.01); H01J 37/32935 (2013.01); B33Y 50/00 (2014.12); H01J 2237/332 (2013.01); H01J 2237/334 (2013.01)]

6 Claims

1. A restoring method of a consumed component used in a plasma processing apparatus, the restoring method comprising:

separating the consumed component from the plasma processing apparatus;

transferring the consumed component to a three-dimensional scanner;

scanning the consumed component in a three-dimensional manner and obtaining image data of the consumed component by an imaging unit of the three-dimensional scanner;

obtaining three-dimensional data indicating a three-dimensional consumed amount, a consumed position and a consumed shape of the consumed component based on a difference between the image data of the consumed component and an original state of a new product;

calculating a consumed amount of the consumed component that exceeds a threshold value based on the three-dimensional data; and

irradiating an energy beam to a source material of the component while supplying the source material based on the three-dimensional data.