| CPC C23C 14/564 (2013.01) [H01J 37/3488 (2013.01)] | 20 Claims |
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1. A deposition equipment with a shielding mechanism, comprising:
a reaction chamber including a containing space;
a carrier located in the containing space, and including a bearing surface and a plurality of alignment protrusion portions, wherein the bearing surface is configured to carry at least one substrate, and the alignment protrusion portions are located around the bearing surface;
a shielding mechanism, comprising:
a first bearing arm located in the containing space, and including a plurality of first alignment portions;
a second bearing arm located in the containing space, and including a plurality of second alignment portions;
a first shielding plate including a first arc groove or a first arc protrusion located on an upper surface of the first shielding plate, and plurality of third alignment portions and a plurality of first alignment concave portions located on a lower surface of the first shielding plate, wherein the first alignment concave portions are located on an inner side of the third alignment portions, and the third alignment portions and the first alignment concave portions are configured to align the first shielding plate with the first bearing arm;
a second shielding plate including a second arc groove or a second arc protrusion located on an upper surface of the second shielding plate, and plurality of fourth alignment portions and a plurality of second alignment concave portions located on a lower surface of the second shielding plate, wherein the second alignment concave portions are located on an inner side of the fourth alignment portions, and the fourth alignment portions and the second alignment concave portions are configured to align the second shielding plate with the second bearing arm; and
a driving device connected to the first bearing arm and the second bearing arm, and driving the first shielding plate and the second shielding plate to swing in opposite directions through the first bearing arm and the second bearing arm respectively, so that the first shielding plate and the second shielding plate being operated in an open state or a shielding state, wherein the first shielding plate and the second shielding plate operating in the shielding state are respectively aligned with the alignment protrusion portions of the carrier through the first alignment concave portions and the second alignment concave portions to shield the bearing surface of the carrier.
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