	US 11,981,759 B2
	Photocurable composition
Fen Wan, Austin, TX (US); Weijun Liu, Cedar Park, TX (US); and Timothy Brian Stachowiak, Austin, TX (US)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on May 18, 2022, as Appl. No. 17/664,037.
Prior Publication US 2023/0374167 A1, Nov. 23, 2023
Int. Cl. C08F 2/46 (2006.01); C08F 2/50 (2006.01); C08F 212/36 (2006.01); C08F 222/10 (2006.01); C08G 61/04 (2006.01); C08K 5/13 (2006.01); C08K 5/3417 (2006.01)

CPC C08F 2/50 (2013.01) [C08F 212/36 (2013.01); C08F 222/102 (2020.02); C08K 5/13 (2013.01); C08K 5/3417 (2013.01)]

19 Claims

19. A method of manufacturing an article, comprising:

applying a layer of a photocurable composition on the substrate, wherein the photocurable composition comprises a polymerizable material and at least one photoinitiator, the polymerizable material comprising at least one multi-functional vinylbenzene monomer in an amount of at least 30 wt % based on the total weight of the polymerizable material, the at least one photoinitiator including an oxime ester compound, and amount of the polymerizable material is at least 85 wt % based on the total weight of the photocurable composition;

bringing the photocurable composition into contact with a template or a superstrate;

irradiating the photocurable composition with light to form a photo-cured layer;

removing the template or the superstrate from the photo-cured layer;

forming a pattern on the substrate;

processing the substrate on which the pattern has been formed in the forming; and

manufacturing an article from the substrate processed in the processing.