| CPC C03B 37/0142 (2013.01) [C03B 2207/12 (2013.01); C03B 2207/32 (2013.01); C03B 2207/52 (2013.01)] | 1 Claim |
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1. A method for producing a glass fine particle deposited body, which produces the glass fine particle deposited body by depositing a glass fine particle on a starting rod disposed inside a reaction vessel, the method comprising:
providing a through hole through which a burner passes on a wall surface of a wall portion disposed to be separated from the starting rod, the burner being provided with metallic gas supply pipes as a main body of the burner and a cover that covers the metallic gas supply pipes in an integrated manner, a pipe for supplying raw material gas, a pipe for supplying oxyhydrogen gas, and a pipe for supplying seal gas are connected to a respective metallic gas supply pipe of the metallic gas supply pipes, the cover covering an entire length of the metallic gas supply pipes and a connection portion of the metallic gas supply pipes connected to a side surface of the metallic gas supply pipes with a predetermined length in an axial direction of the burner and a given constant outer diameter;
retracting the burner while keeping a gap with the through hole a given constant length as the glass fine particle deposited body grows; and
introducing clean air into the reaction vessel through the gap,
wherein octamethylcyclotetrasiloxane (OMCTS) is used as a raw material and the metallic gas supply pipes are heated to 230° C. or higher.
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