	US 11,981,594 B2
	Quartz glass with low content of hydroxyl and high purity and method for preparing the same
Ming-Ming Tang, Nantong (CN); Meng-Fei Wang, Nantong (CN); Yi-Gang Qian, Nantong (CN); Jun-Yi Ma, Nantong (CN); Xian-Gen Zhang, Nantong (CN); Yi-Chun Shen, Nantong (CN); and Ya-Li Chen, Nantong (CN)
Assigned to ZHONGTIAN TECHNOLOGY ADVANCED MATERIALS CO., LTD., Nantong (CN); and JIANGSU ZHONGTIAN TECHNOLOGY CO., LTD., Nantong (CN)
Appl. No. 17/422,897
Filed by ZHONGTIAN TECHNOLOGY ADVANCED MATERIALS CO., LTD., Nantong (CN); and JIANGSU ZHONGTIAN TECHNOLOGY CO., LTD., Nantong (CN)
PCT Filed Dec. 9, 2020, PCT No. PCT/CN2020/134893 § 371(c)(1), (2) Date Jul. 14, 2021, PCT Pub. No. WO2021/174936, PCT Pub. Date Sep. 10, 2021.
Claims priority of application No. 202011001200.0 (CN), filed on Sep. 22, 2020.
Prior Publication US 2022/0340469 A1, Oct. 27, 2022
Int. Cl. C03B 19/06 (2006.01); C03B 19/14 (2006.01); C03C 1/02 (2006.01); C03C 3/06 (2006.01); C03B 25/00 (2006.01)

CPC C03B 19/066 (2013.01) [C03B 19/1453 (2013.01); C03C 1/022 (2013.01); C03C 3/06 (2013.01); C03B 25/00 (2013.01); C03B 2201/04 (2013.01); C03C 2201/02 (2013.01); C03C 2203/10 (2013.01); C03C 2203/40 (2013.01); C03C 2204/00 (2013.01)]

9 Claims

1. A method for preparing quartz glass with low content of hydroxyl and high purity, comprising:

preparing silica powders, the silica powders comprising hydroxyl groups;

dehydroxylating the silica powders, comprising:

adjusting a temperature of a furnace to a first temperature and drying the silica powders in the furnace at the first temperature;

raising the temperature of the furnace up to a second temperature and introducing a first oxidizing gas comprising halogen gas into the furnace, a total mass of the introduced first oxidizing gas being within 1% of a total mass of the silica powders, thereby heating the silica powers at the second temperature and obtaining first dehydroxylated powders;

raising the temperature of the furnace up to a third temperature and introducing a second oxidizing gas comprising oxygen or ozone into the furnace, thereby heating the silica powers at the third temperature and obtaining second dehydroxylated powders;

heating the second dehydroxylated powders up to a fourth temperature to vitrify the second dehydroxylated powders, thereby obtaining a vitrified body; and

cooling the vitrified body to obtain the quartz glass.