US 11,981,558 B2
Piezoelectric actuator provided with a deformable structure having improved mechanical properties and fabrication method thereof
Domenico Giusti, Caponago (IT); Marco Ferrera, Concorezzo (IT); and Carlo Luigi Prelini, Seveso (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Apr. 26, 2021, as Appl. No. 17/240,782.
Claims priority of application No. 102020000010261 (IT), filed on May 7, 2020.
Prior Publication US 2021/0347634 A1, Nov. 11, 2021
Int. Cl. H04R 7/04 (2006.01); B81B 3/00 (2006.01); B81C 1/00 (2006.01); F16K 31/00 (2006.01); H04R 1/02 (2006.01); H04R 3/00 (2006.01); H04R 7/18 (2006.01); H04R 19/02 (2006.01)
CPC B81B 3/007 (2013.01) [B81C 1/00658 (2013.01); F16K 31/005 (2013.01); H04R 1/02 (2013.01); H04R 3/00 (2013.01); H04R 7/04 (2013.01); H04R 7/18 (2013.01); H04R 19/02 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/054 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0338 (2013.01); B81B 2203/04 (2013.01); B81B 2207/03 (2013.01); H04R 2201/003 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A MEMS actuator, comprising:
a body surrounding a cavity;
a deformable structure on the cavity, the deformable structure including:
a movable portion;
a plurality of deformable elements arranged consecutively, the plurality of deformable elements connects the movable portion to the body;
a plurality of arms coupling the movable portion, the plurality of deformable elements, and the body together; and
a plurality of stiffening structures, respective ones of the plurality of stiffening structures being integral with respective ones of the plurality of arms;
at least one plurality of actuation structures on the deformable elements.