a moving body;

a top plate which is arranged above the moving body and separated from the moving body;

at least one magnet plate comprising a plurality of permanent magnets which are arranged parallel to a predetermined moving direction on a lower surface of the top plate in a manner that adjacent polarities are different;

a moving control coil unit comprising a plurality of exciting coils which are arranged on an upper surface of the moving body along a predetermined magnet plate among the at least one magnet plate and separated from the predetermined magnet plate;

at least two top gap control coil units comprising a plurality of exciting coils which are arranged on the upper surface of the moving body along the predetermined magnet plate among the at least one magnet plate and separated from the magnet plate; and

a controller which supplies drive currents respectively to the moving control coil unit and the at least two top gap control coil units to make the moving body move along the moving direction, and controls a top gap which is an interval between the magnet plate and the at least two top gap control coil units,

wherein the moving control coil unit and the at least two top gap control coil units are arranged on the same line along the predetermined magnet plate; and

the controller

supplies a d-axis current to the at least two top gap control coil units as the drive current, wherein the d-axis current is a current generating a magnetic field in a direction parallel to a direction of a magnetic field generated by the predetermined magnet plate, and

supplies a q-axis current to the moving control coil unit as the drive current, wherein the q-axis current is orthogonal to the d-axis current.