US 11,980,992 B2
Integrated abrasive polishing pads and manufacturing methods
Ashavani Kumar, Sunnyvale, CA (US); Ashwin Chockalingam, Santa Clara, CA (US); Sivapackia Ganapathiappan, Los Altos, CA (US); Rajeev Bajaj, San Jose, CA (US); Boyi Fu, San Jose, CA (US); Daniel Redfield, Morgan Hill, CA (US); Nag B. Patibandla, Pleasanton, CA (US); Mario Dagio Cornejo, San Jose, CA (US); Amritanshu Sinha, Sunnyvale, CA (US); Yan Zhao, Santa Clara, CA (US); Ranga Rao Arnepalli, Andhra Pradesh (IN); and Fred C. Redeker, Fremont, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 16, 2022, as Appl. No. 17/946,547.
Application 17/946,547 is a division of application No. 16/042,016, filed on Jul. 23, 2018, granted, now 11,471,999.
Claims priority of provisional application 62/537,290, filed on Jul. 26, 2017.
Prior Publication US 2023/0052048 A1, Feb. 16, 2023
Int. Cl. B24B 37/24 (2012.01); B24B 37/16 (2012.01); B24B 37/20 (2012.01); B24B 37/26 (2012.01); B24D 11/04 (2006.01); B24D 18/00 (2006.01); B29C 64/112 (2017.01); B33Y 10/00 (2015.01); B33Y 30/00 (2015.01); B33Y 80/00 (2015.01); H01L 21/306 (2006.01)
CPC B24B 37/245 (2013.01) [B24B 37/26 (2013.01); B24D 11/04 (2013.01); B24D 18/00 (2013.01); B29C 64/112 (2017.08); B33Y 10/00 (2014.12); B33Y 80/00 (2014.12); B24B 37/16 (2013.01); B24B 37/20 (2013.01); B24D 2203/00 (2013.01); B33Y 30/00 (2014.12); H01L 21/30625 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of forming a polishing article, comprising:
dispensing a first plurality of droplets of a first precursor;
curing the first plurality of droplets to form a first layer comprising a portion of a sub-polishing element;
dispensing a second plurality of droplets of the first precursor and a second precursor onto the first layer, the second precursor comprising functionalized abrasive particles having a polymerizable group chemically bonded to surfaces thereof, wherein less than about 50% of bonding sites of the surfaces of the functionalized abrasive particles have the polymerizable group bonded thereto; and
curing the second plurality of droplets to form a second layer comprising portions of the sub-polishing element and portions of a plurality of polishing elements.