US 11,980,990 B2
Method for machining a workpiece in the production of an optical element
Manfred Matena, Essen (DE); Franz-Josef Stickel, Aalen-Unterrombach (DE); Marc Saitner, Oberkochen (DE); Robert Fichtl, Aalen (DE); and Hans-Peter Brust, Essingen-Lauterburg (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Mar. 5, 2020, as Appl. No. 16/810,189.
Application 16/810,189 is a continuation of application No. PCT/EP2018/071240, filed on Aug. 6, 2018.
Claims priority of application No. 102017216033.0 (DE), filed on Sep. 12, 2017.
Prior Publication US 2020/0198086 A1, Jun. 25, 2020
Int. Cl. B24B 13/01 (2006.01); B24B 37/26 (2012.01); B24D 13/14 (2006.01)
CPC B24B 13/01 (2013.01) [B24B 37/26 (2013.01); B24D 13/147 (2013.01); B24D 2203/00 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method, comprising:
using a polishing tool to move a structured polishing pad over a surface of a workpiece to remove material from the workpiece, thereby zonally polishing the workpiece to provide a polished surface of the workpiece;
after zonally polishing the workpiece, smoothing the polished surface of the workpiece to provide a smoothed surface of the workpiece; and
disposing a reflecting layer on the smoothed surface of the workpiece.