US 12,302,726 B2
Microstructure array and method of manufacturing the same and micro-light-emitting diode and method of manufacturing the same and display device
JaeMin Myoung, Goyang-si (KR); DoHoon Kim, Paju-si (KR); and HeeJu An, Seoul (KR)
Assigned to YONSEI UNIVERSITY, UNIVERSITY-INDUSTRY FOUNDATION (UIF), Seoul (KR)
Filed by YONSEI UNIVERSITY, UNIVERSITY—INDUSTRY FOUNDATION (UIF), Seoul (KR)
Filed on Apr. 29, 2022, as Appl. No. 17/732,629.
Claims priority of application No. 10-2021-0066437 (KR), filed on May 24, 2021.
Prior Publication US 2022/0376217 A1, Nov. 24, 2022
Int. Cl. H10K 71/00 (2023.01); H10K 50/135 (2023.01); H10K 59/35 (2023.01); H10K 71/12 (2023.01); H10K 71/40 (2023.01); H10K 85/50 (2023.01); H10K 102/00 (2023.01)
CPC H10K 59/35 (2023.02) [H10K 50/135 (2023.02); H10K 71/00 (2023.02); H10K 71/12 (2023.02); H10K 71/40 (2023.02); H10K 85/50 (2023.02); H10K 71/821 (2023.02); H10K 2102/351 (2023.02); H10K 2102/361 (2023.02)] 13 Claims
OG exemplary drawing
 
1. A method of manufacturing a microstructure array, the method comprising
preparing a red light-emitting perovskite precursor solution, a green light-emitting perovskite precursor solution, and a blue light-emitting perovskite precursor solution, respectively,
coating the red light-emitting perovskite precursor solution, the green light-emitting perovskite precursor solution, and the blue light-emitting perovskite precursor solution, respectively, on a substrate having partitioned first, second, and third regions to form a red light-emitting perovskite precursor film, a green light-emitting perovskite precursor film, and a blue light-emitting perovskite precursor film,
disposing a mold having a plurality of concave micropatterns on the red light-emitting perovskite precursor film, the green light-emitting perovskite precursor film, and the blue light-emitting perovskite precursor film, respectively,
heat-treating the red light-emitting perovskite precursor film, the green light-emitting perovskite precursor film, and the blue light-emitting perovskite precursor film in the plurality of concave micropatterns to obtain each of red light-emitting perovskite nanocrystals, green light-emitting perovskite nanocrystals, and blue light-emitting perovskite nanocrystals, and
removing the mold to form a microstructure array in which a plurality of red light-emitting microstructures comprising the red light-emitting perovskite nanocrystals, a plurality of green light-emitting microstructures comprising the green light-emitting perovskite nanocrystals, and a plurality of blue light-emitting microstructures comprising the blue light-emitting perovskite nanocrystals are arranged.