US 12,302,703 B2
Display device and method of manufacturing display device
Chungi You, Asan-si (KR); and Sang-Ho Moon, Cheonan-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., Ltd., Yongin-Si (KR)
Filed on Oct. 28, 2021, as Appl. No. 17/512,926.
Claims priority of application No. 10-2020-0175877 (KR), filed on Dec. 15, 2020.
Prior Publication US 2022/0190078 A1, Jun. 16, 2022
Int. Cl. H01L 21/00 (2006.01); H10K 50/80 (2023.01); H10K 59/121 (2023.01); H10K 59/131 (2023.01); H10K 71/00 (2023.01); H10K 59/12 (2023.01)
CPC H10K 59/1213 (2023.02) [H10K 50/80 (2023.02); H10K 59/1216 (2023.02); H10K 59/131 (2023.02); H10K 71/00 (2023.02); H10K 59/1201 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A method of manufacturing a display device, the method comprising:
forming an active pattern on a substrate, the active pattern including a first region, a second region spaced apart from the first region, and a third region disposed between the first region and the second region;
forming an insulation layer on the active pattern;
forming a first contact hole exposing a portion of the first region, a second contact hole exposing a portion of the second region, and an opening exposing the third region in the insulation layer;
forming a conductive layer filling the first and second contact holes and the opening on the insulation layer;
etching a portion of the conductive layer filling the opening to form a conductive pattern filling the first and second contact holes while at the same time removing the third region; and
forming a planarization layer on the conductive pattern.