| CPC H10F 39/80373 (2025.01) [H10F 39/18 (2025.01); H10F 39/807 (2025.01); H10F 39/813 (2025.01)] | 14 Claims |
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1. An image sensor, comprising:
a substrate comprising a front side and a back side opposing the front side; and
a dual vertical gate that includes a first vertical extension portion, a second vertical extension portion spaced apart from the first vertical extension portion in a first direction by a separation area, and a connection portion that connects the first vertical extension portion and the second vertical extension portion,
wherein each of the first and second vertical extension portions vertically extends in a third direction perpendicular to the first direction into a substrate from the front side of the substrate to the back side of the substrate,
wherein the separation area has a top surface and a bottom surface opposing the top surface,
wherein a distance from the top surface of the separation area to the front side of the substrate in the third direction is shorter than a distance from the bottom surface of the separation area to the front side of the substrate in the third direction,
wherein the top surface of the separation area is spaced apart from the front side of the substrate in the third direction,
wherein the top surface of the separation area is disposed in the substrate,
wherein the first vertical extension portion has a first width at a level of the top surface of the separation area in the first direction and has a second width at a level of the bottom surface of the separation area in the first direction, and
wherein the second width is smaller than the first width.
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