US 12,301,202 B2
Bulk acoustic wave resonator with slit
Jianmin Miao, Shanghai (CN); and Ruizhen Zhang, Shanghai (CN)
Assigned to SV SensTech (WUXI) Co., Ltd., Wuxl (CN)
Appl. No. 17/438,879
Filed by SV SensTech (WUXI) Co., Ltd., Wuxi (CN)
PCT Filed Aug. 7, 2020, PCT No. PCT/CN2020/107912
§ 371(c)(1), (2) Date Sep. 13, 2021,
PCT Pub. No. WO2021/036758, PCT Pub. Date Mar. 4, 2021.
Claims priority of application No. 201910818904.8 (CN), filed on Aug. 30, 2019.
Prior Publication US 2022/0158605 A1, May 19, 2022
Int. Cl. H03H 9/02 (2006.01)
CPC H03H 9/0211 (2013.01) [H03H 9/02015 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A bulk acoustic wave resonator, comprising:
a first electrode, a piezoelectric layer and a second electrode, wherein the piezoelectric layer is disposed between the first electrode and the second electrode, the piezoelectric layer is provided with at least one slit, and along a direction pointing from the first electrode to the second electrode, the at least one slit penetrates through at least the piezoelectric layer;
wherein an orthogonal projection of the at least one slit on the first electrode is not parallel to any side of an orthogonal projection of the piezoelectric layer on the first electrode; and
wherein a shape of the orthogonal projection of the at least one slit on the first electrode comprises a rectangle, an ellipse or a trapezoid; and
wherein a shape of an orthogonal projection of the bulk acoustic wave resonator on the first electrode is a circle, a square or a rectangle.