US 12,301,201 B2
Acoustic wave element having high acoustic velocity layer
Rei Goto, Osaka (JP); and Siarhei Dmitrievich Barsukou, Takarazuka (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Woburn, MA (US)
Filed on Sep. 25, 2020, as Appl. No. 17/033,336.
Claims priority of provisional application 62/907,023, filed on Sep. 27, 2019.
Claims priority of provisional application 62/907,021, filed on Sep. 27, 2019.
Prior Publication US 2021/0099152 A1, Apr. 1, 2021
Int. Cl. H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/56 (2006.01)
CPC H03H 9/02031 (2013.01) [H03H 9/13 (2013.01); H03H 9/564 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave element comprising:
a piezoelectric layer including aluminum nitride;
a diamond like carbon layer and an air cavity below the piezoelectric layer;
a first metal layer comprising titanium positioned between the diamond like carbon layer and the piezoelectric layer;
a second metal layer comprising molybdenum positioned between the first metal layer and the piezoelectric layer; and
an interdigital transducer electrode above the piezoelectric layer, that generates a Lamb wave having a wavelength of λ.