US 12,301,199 B2
Impedance tuning utility of vector space defined by transmission line quantities
David Coumou, Webster, NY (US); and David Peterson, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 5, 2022, as Appl. No. 17/737,677.
Prior Publication US 2023/0361746 A1, Nov. 9, 2023
Int. Cl. H03H 7/40 (2006.01); H03F 1/56 (2006.01)
CPC H03H 7/40 (2013.01) [H03F 1/56 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of impedance tuning in a semiconductor processing tool, comprising:
measuring a voltage and a current of a transmission line;
converting an analog voltage signal of the measured voltage and an analog current signal of the measured current into a digital voltage signal and a digital current signal;
calculating a u-vector from the digital voltage signal and the digital current signal, the u-vector having real components and imaginary components;
calculating a C1 position of a first capacitor with the real components of the u-vector; and
calculating a C2 position of a second capacitor with the imaginary components of the u-vector.