US 12,301,176 B2
Low loss travelling wave parametric devices using planar capacitors
Michael Karunendra Selvanayagam, Ossining, NY (US); Corrado P. Mancini, Hopewell Junction, NY (US); David Lokken-Toyli, White Plains, NY (US); Gerald W. Gibson, Danbury, CT (US); Kathryn Turner Schonenberg, Wappingers Falls, NY (US); and Shayne Cairns, Valhalla, NY (US)
Assigned to INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US)
Filed by INTERNATIONAL BUSINESS MACHINES CORPORATION, Armonk, NY (US)
Filed on Sep. 15, 2022, as Appl. No. 17/932,659.
Prior Publication US 2024/0097634 A1, Mar. 21, 2024
Int. Cl. H03F 19/00 (2006.01)
CPC H03F 19/00 (2013.01) 20 Claims
OG exemplary drawing
 
1. A travelling wave parametric device (TWPD), comprising:
a dielectric substrate;
a periodic array of Josephson junctions situated in a tri-layer structure, wherein:
the tri-layer structure includes a common electrode layer, a base electrode layer, and a layer of aluminum oxide positioned between the common electrode layer and the base electrode layer, and
the tri-layer structure is supported by the dielectric substrate;
an interlevel dielectric layer supported by the tri-layer structure;
a metal layer supported by the interlevel dielectric layer; and
a plurality of capacitors coupled to the Josephson junction and arranged in an interdigitated arrangement in the tri-layer structure.