US 12,301,144 B2
Transport system and control method of transport system
Ryuji Kimura, Kanagawa (JP); Tatsuya Shinkai, Tokyo (JP); Takeshi Yamamoto, Kanagawa (JP); Mitsuharu Ezawa, Kanagawa (JP); Kazushi Shimomura, Kanagawa (JP); and Tomohiro Mizuno, Kanagawa (JP)
Assigned to CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed by CANON KABUSHIKI KAISHA, Tokyo (JP)
Filed on Oct. 11, 2021, as Appl. No. 17/498,641.
Claims priority of application No. 2020-182799 (JP), filed on Oct. 30, 2020.
Prior Publication US 2022/0140762 A1, May 5, 2022
Int. Cl. H02P 25/064 (2016.01); H01L 21/677 (2006.01); H02K 41/03 (2006.01)
CPC H02P 25/064 (2016.02) [H01L 21/67709 (2013.01); H01L 21/67715 (2013.01); H02K 41/031 (2013.01)] 14 Claims
OG exemplary drawing
 
14. A control method of a transport system including a stator having a first magnetic force unit; a mover having a second magnetic force unit; and a control unit, wherein the control unit controls a magnetic force acting between the first magnetic force unit and the second magnetic force unit to transport the mover in a first direction, the mover being transported relative to the stator in a floating state, and wherein the stator has a first regulating member row including a plurality of first regulating members and a second regulating member row including a plurality of second regulating members, the mover, in a second direction intersecting the first direction, being disposed between the first regulating member row and the second regulating member row, the control method comprising:
preforming a first process of applying a rotational force to the mover such that one of the first regulating members of the first regulating member row serves as a fulcrum when the mover contacts the first regulating member row, and the mover and the plurality of first regulating members transitioning to a non-contact state after the first process.